半导体后道工厂的加载锁抽真空
加载锁抽气时间从 6.0 秒降至 4.2 秒。换油周期从 800 小时延长至 2,800 小时。无尘室颗粒数不变。
Always the right choice — industrial vacuum and blowers since 1995 Dr.Vakuum
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